Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8871304 | (Amide amino alkane) metal compound, method of manufacturing metal-containing thin film using said metal compound | Osamu Fujimura, Masashi Shirai, Hiroshi Nihei | 2014-10-28 |
| 8304567 | Organoruthenium complex, and method for production of ruthenium thin film using the ruthenium complex | Takumi Kadota, Chihiro Hasegawa, Hiroshi Nihei | 2012-11-06 |
| 7595414 | Metal complex compound comprising β-diketonato ligand | Takumi Kadota, Chihiro Hasegawa, Kouhei Watanuki, Hiroyuki Sakurai | 2009-09-29 |