Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12398166 | Method of selectively forming cobalt metal layer by using cobalt compound, and method of fabricating semiconductor device by using cobalt compound | Soyoung Lee, Masashi Shirai, Jaesoon Lim, Younjoung Cho | 2025-08-26 |
| 11254698 | Cobalt precursor and methods for manufacture using the same | Soyoung Lee, Takamasa Miyazaki, Yousuke Satou, Kouhei Sugimoto, Masashi Shirai +3 more | 2022-02-22 |
| 9194041 | Tris(dialkylamide)aluminum compound, and method for producing aluminum-containing thin film using same | Masashi Shirai, Chihiro Hasegawa | 2015-11-24 |
| 8871304 | (Amide amino alkane) metal compound, method of manufacturing metal-containing thin film using said metal compound | Osamu Fujimura, Hiroki Kanato, Masashi Shirai | 2014-10-28 |
| 8304567 | Organoruthenium complex, and method for production of ruthenium thin film using the ruthenium complex | Takumi Kadota, Chihiro Hasegawa, Hiroki Kanato | 2012-11-06 |
| 5127379 | Internal combustion engine | Tatsuo Kobayashi, Norihiko Nakamura, Kenichi Nomura, Hiroshi Nomura | 1992-07-07 |