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Capacitor and memory device |
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| 11678476 |
Capacitor and DRAM device including the same |
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| 11524973 |
Metal compounds and methods of fabricating semiconductor devices using the same |
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| 11466043 |
Niobium compound and method of forming thin film |
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| 11332486 |
Aluminum compound and method for manufacturing semiconductor device using the same |
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| 11254698 |
Cobalt precursor and methods for manufacture using the same |
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| 11081389 |
Method of manufacturing semiconductor device |
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2021-08-03 |
| 10900119 |
Tungsten precursor and method of forming Tungsten containing layer using the same |
Soyoung Lee, Jieun Yun, Akio Saito, Tsubasa Shiratori, Yutaro Aoki |
2021-01-26 |
| 10847362 |
Method of fabricating semiconductor device |
Gyu-hee Park, Yangsun Park, Younjoung Cho |
2020-11-24 |
| 7989877 |
Semiconductor devices including a dielectric layer |
Kyuho Cho, Jaehyoung Choi, Younsoo Kim |
2011-08-02 |
