Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11967502 | Methods of forming material layer, semiconductor devices, and methods of manufacturing the same | Younsoo Kim, Jaewoon Kim, Haeryong KIM, Jinho Lee | 2024-04-23 |
| 11807652 | Tungsten compound, raw material for thin film formation and method for producing thin film | Akio Saito, Yutaro Aoki | 2023-11-07 |
| 10927460 | Raw material for forming thin film, and method for manufacturing thin film | Hiroki Sato, Naoki Yamada, Haruyoshi Sato | 2021-02-23 |
| 10913754 | Lanthanum compound and methods of forming thin film and integrated circuit device using the lanthanum compound | Gyu-hee Park, Youn Soo Kim, Jae-Soon Lim, Youn-Joung Cho, Kazuki HARANO +2 more | 2021-02-09 |
| 10900119 | Tungsten precursor and method of forming Tungsten containing layer using the same | Soyoung Lee, Jaesoon Lim, Jieun Yun, Akio Saito, Yutaro Aoki | 2021-01-26 |
| 10651031 | Tantalum compound | Seung-min Ryu, Takanori Koide, Naoki Yamada, Jae-Soon Lim, Youn-Joung Cho | 2020-05-12 |
| 10364495 | Method for producing a thin film | Tomoharu Yoshino, Atsushi Sakurai, Masako HATASE, Hiroyuki Uchiuzou, Akihiro Nishida | 2019-07-30 |
| 10155784 | Alcohol compound | Atsushi Sakurai, Masako HATASE, Naoki Yamada, Akio Saito, Tomoharu Yoshino | 2018-12-18 |
| 10134582 | Tantalum compound and methods of forming thin film and fabricating integrated circuit device by using the same | Seung-min Ryu, Takanori Koide, Naoki Yamada, Jae-Soon Lim, Youn-Joung Cho | 2018-11-20 |
| 9960032 | Methods of forming thin films and methods of fabricating integrated circuit devices using the same | Jae-wan Chang, Youn Soo Kim | 2018-05-01 |
| 9896468 | Metal alkoxide compound, thin-film-forming material, method for producing thin film, and alcohol compound | Atsushi Sakurai, Masako HATASE, Naoki Yamada, Akio Saito, Tomoharu Yoshino | 2018-02-20 |
| 9663538 | Aluminum compound, thin-film forming raw material, and method for producing thin film | Tomoharu Yoshino, Atsushi Sakurai, Masako HATASE, Hiroyuki Uchiuzou, Akihiro Nishida | 2017-05-30 |
| 9437419 | Method of forming a layer using a trialkylsilane silicon precursor compound | Younsoo Kim, Sangyeol Kang, Hiroki Sato, Naoki Yamada, Chayoung Yoo +3 more | 2016-09-06 |