| 12415821 |
Tin compound, thin-film forming raw material containing said compound, thin film formed from said thin-film forming raw material, method of producing said thin film using said compound as precursor, and method of producing said thin film |
Yoshiki OOE, Atsushi Yamashita |
2025-09-16 |
| 12371778 |
Cobalt compound, thin-film forming raw material, thin-film, and method of producing thin-film |
Keisuke Takeda, Atsushi Yamashita |
2025-07-29 |
| 12275748 |
Amidinate compound, dimer compound thereof, thin-film forming raw material, and method of producing thin film |
Yoshiki OOE, Keisuke Takeda, Ryota FUKUSHIMA, Chiaki MITSUI, Atsushi Yamashita |
2025-04-15 |
| 11760771 |
Ruthenium compound, raw material for forming thin film, and method for producing thin film |
Masaki ENZU, Nana OKADA, Masako HATASE |
2023-09-19 |
| 11623935 |
Raw material for forming thin film by atomic layer deposition method, method of producing thin film, and alkoxide compound |
Atsushi Sakurai, Masako HATASE, Akihiro Nishida, Atsushi Yamashita |
2023-04-11 |
| 11618762 |
Compound, raw material for forming thin film, method for manufacturing thin film, and amidine compound |
Nana OKADA, Akihiro Nishida, Atsushi Yamashita |
2023-04-04 |
| 11555044 |
Thin-film forming raw material for use in atomic layer deposition method, thin-film forming raw material, method for producing thin-film, and compound |
Nana OKADA, Atsushi Yamashita |
2023-01-17 |
| 11161867 |
Compound, raw material for forming thin film, method for manufacturing thin film, and amidine compound |
Nana OKADA, Akihiro Nishida, Atsushi Yamashita |
2021-11-02 |
| 10920313 |
Diazadienyl compound, raw material for forming thin film, and method for manufacturing thin film |
Masaki ENZU, Akihiro Nishida, Atsushi Yamashita |
2021-02-16 |
| 10882874 |
Vanadium compound |
Makoto Okabe, Akihiro Nishida |
2021-01-05 |
| 10364495 |
Method for producing a thin film |
Atsushi Sakurai, Tsubasa Shiratori, Masako HATASE, Hiroyuki Uchiuzou, Akihiro Nishida |
2019-07-30 |
| 10351584 |
Alkoxide compound, raw material for forming thin film, method for manufacturing thin film, and alcohol compound |
Atsushi Sakurai, Masako HATASE, Masaki ENZU |
2019-07-16 |
| 10253408 |
Compound, thin film-forming material, and thin film manufacturing method |
Masaki ENZU, Akihiro Nishida, Nana SUGIURA |
2019-04-09 |
| 10167304 |
Ruthenium compound, material for thin film formation, and process for thin film formation |
Masako HATASE, Masaki ENZU, Atsushi Sakurai |
2019-01-01 |
| 10155784 |
Alcohol compound |
Atsushi Sakurai, Masako HATASE, Naoki Yamada, Tsubasa Shiratori, Akio Saito |
2018-12-18 |
| 10118940 |
Alkoxide compound and raw material for forming thin film |
Senji Wada, Akio Saito |
2018-11-06 |
| 10011623 |
Alkoxide compound, thin film-forming starting material, and thin film formation method |
Atsushi Sakurai, Masako HATASE, Masaki ENZU |
2018-07-03 |
| 9994593 |
Copper compound, starting material for forming thin film, and method for manufacturing thin film |
Masaki ENZU, Atsushi Sakurai, Akihiro Nishida, Makoto Okabe |
2018-06-12 |
| 9896468 |
Metal alkoxide compound, thin-film-forming material, method for producing thin film, and alcohol compound |
Atsushi Sakurai, Masako HATASE, Naoki Yamada, Tsubasa Shiratori, Akio Saito |
2018-02-20 |
| 9663538 |
Aluminum compound, thin-film forming raw material, and method for producing thin film |
Atsushi Sakurai, Tsubasa Shiratori, Masako HATASE, Hiroyuki Uchiuzou, Akihiro Nishida |
2017-05-30 |
| 9359383 |
β-ketoimine ligand, method of preparing the same, metal complex comprising the same and method of forming thin film using the same |
Youn-Joung Cho, Senji Wada, Jung-Sik Choi, Jin Seo Lee, Atsushi Sakurai +5 more |
2016-06-07 |
| 9359382 |
β-ketoimine ligand, method of preparing the same, metal complex comprising the same and method of forming thin film using the same |
Youn-Joung Cho, Senji Wada, Jung-Sik Choi, Jin Seo Lee, Atsushi Sakurai +5 more |
2016-06-07 |
