Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12276022 | Alkoxide compound, thin-film forming raw material, and method of producing thin-film | Atsushi Sakurai, Nana OKADA, Ryota FUKUSHIMA | 2025-04-15 |
| 12264168 | Ruthenium compound, thin-film forming raw material, and method of producing thin film | Masaki ENZU, Keisuke Takeda | 2025-04-01 |
| 12104245 | Compound, thin-film forming raw material that contains said compound, and method of manufacturing thin film | Atsushi Sakurai, Masaki ENZU, Keisuke Takeda, Ryota FUKUSHIMA, Atsushi Yamashita | 2024-10-01 |
| 11760771 | Ruthenium compound, raw material for forming thin film, and method for producing thin film | Tomoharu Yoshino, Masaki ENZU, Nana OKADA | 2023-09-19 |
| 11623935 | Raw material for forming thin film by atomic layer deposition method, method of producing thin film, and alkoxide compound | Atsushi Sakurai, Tomoharu Yoshino, Akihiro Nishida, Atsushi Yamashita | 2023-04-11 |
| 10364495 | Method for producing a thin film | Tomoharu Yoshino, Atsushi Sakurai, Tsubasa Shiratori, Hiroyuki Uchiuzou, Akihiro Nishida | 2019-07-30 |
| 10351584 | Alkoxide compound, raw material for forming thin film, method for manufacturing thin film, and alcohol compound | Atsushi Sakurai, Tomoharu Yoshino, Masaki ENZU | 2019-07-16 |
| 10167304 | Ruthenium compound, material for thin film formation, and process for thin film formation | Masaki ENZU, Atsushi Sakurai, Tomoharu Yoshino | 2019-01-01 |
| 10155784 | Alcohol compound | Atsushi Sakurai, Naoki Yamada, Tsubasa Shiratori, Akio Saito, Tomoharu Yoshino | 2018-12-18 |
| 10011623 | Alkoxide compound, thin film-forming starting material, and thin film formation method | Atsushi Sakurai, Tomoharu Yoshino, Masaki ENZU | 2018-07-03 |
| 9896468 | Metal alkoxide compound, thin-film-forming material, method for producing thin film, and alcohol compound | Atsushi Sakurai, Naoki Yamada, Tsubasa Shiratori, Akio Saito, Tomoharu Yoshino | 2018-02-20 |
| 9663538 | Aluminum compound, thin-film forming raw material, and method for producing thin film | Tomoharu Yoshino, Atsushi Sakurai, Tsubasa Shiratori, Hiroyuki Uchiuzou, Akihiro Nishida | 2017-05-30 |
| 9472345 | Aluminum precursor, method of forming a thin film and method of forming a capacitor using the same | Sang-Chul Youn, Atsushi Sakurai, Youn-Joung Cho, Ji-Na Kang, Naoki Yamada +1 more | 2016-10-18 |