| 12276022 |
Alkoxide compound, thin-film forming raw material, and method of producing thin-film |
Atsushi Sakurai, Nana OKADA, Ryota FUKUSHIMA |
2025-04-15 |
| 12264168 |
Ruthenium compound, thin-film forming raw material, and method of producing thin film |
Masaki ENZU, Keisuke Takeda |
2025-04-01 |
| 12104245 |
Compound, thin-film forming raw material that contains said compound, and method of manufacturing thin film |
Atsushi Sakurai, Masaki ENZU, Keisuke Takeda, Ryota FUKUSHIMA, Atsushi Yamashita |
2024-10-01 |
| 11760771 |
Ruthenium compound, raw material for forming thin film, and method for producing thin film |
Tomoharu Yoshino, Masaki ENZU, Nana OKADA |
2023-09-19 |
| 11623935 |
Raw material for forming thin film by atomic layer deposition method, method of producing thin film, and alkoxide compound |
Atsushi Sakurai, Tomoharu Yoshino, Akihiro Nishida, Atsushi Yamashita |
2023-04-11 |
| 10364495 |
Method for producing a thin film |
Tomoharu Yoshino, Atsushi Sakurai, Tsubasa Shiratori, Hiroyuki Uchiuzou, Akihiro Nishida |
2019-07-30 |
| 10351584 |
Alkoxide compound, raw material for forming thin film, method for manufacturing thin film, and alcohol compound |
Atsushi Sakurai, Tomoharu Yoshino, Masaki ENZU |
2019-07-16 |
| 10167304 |
Ruthenium compound, material for thin film formation, and process for thin film formation |
Masaki ENZU, Atsushi Sakurai, Tomoharu Yoshino |
2019-01-01 |
| 10155784 |
Alcohol compound |
Atsushi Sakurai, Naoki Yamada, Tsubasa Shiratori, Akio Saito, Tomoharu Yoshino |
2018-12-18 |
| 10011623 |
Alkoxide compound, thin film-forming starting material, and thin film formation method |
Atsushi Sakurai, Tomoharu Yoshino, Masaki ENZU |
2018-07-03 |
| 9896468 |
Metal alkoxide compound, thin-film-forming material, method for producing thin film, and alcohol compound |
Atsushi Sakurai, Naoki Yamada, Tsubasa Shiratori, Akio Saito, Tomoharu Yoshino |
2018-02-20 |
| 9663538 |
Aluminum compound, thin-film forming raw material, and method for producing thin film |
Tomoharu Yoshino, Atsushi Sakurai, Tsubasa Shiratori, Hiroyuki Uchiuzou, Akihiro Nishida |
2017-05-30 |
| 9472345 |
Aluminum precursor, method of forming a thin film and method of forming a capacitor using the same |
Sang-Chul Youn, Atsushi Sakurai, Youn-Joung Cho, Ji-Na Kang, Naoki Yamada +1 more |
2016-10-18 |
