| 12051586 |
Method of manufacturing semiconductor device |
Seung-min Ryu, Jiyu Choi, Younjoung Cho |
2024-07-30 |
| 11901191 |
Atomic layer etching method and semiconductor device manufacturing method using the same |
Eun Hyea KO, Hee Yeon Jeong, Jun-Hee Cho, Joong Jin PARK, Byeong-il YANG +2 more |
2024-02-13 |
| 11524973 |
Metal compounds and methods of fabricating semiconductor devices using the same |
Seung-min Ryu, Akio Saito, Takanori Koide, Atsushi Yamashita, Kazuki HARANO +3 more |
2022-12-13 |
| 11332486 |
Aluminum compound and method for manufacturing semiconductor device using the same |
Takanori Koide, Yoshiki Manabe, Masayuki Kimura, Akio Saito, Jaesoon Lim +1 more |
2022-05-17 |
| 11081389 |
Method of manufacturing semiconductor device |
Seung-min Ryu, Younsoo Kim, Jaesoon Lim, Younjoung Cho |
2021-08-03 |
| 10913754 |
Lanthanum compound and methods of forming thin film and integrated circuit device using the lanthanum compound |
Youn Soo Kim, Jae-Soon Lim, Youn-Joung Cho, Kazuki HARANO, Haruyoshi Sato +2 more |
2021-02-09 |
| 10847362 |
Method of fabricating semiconductor device |
Yangsun Park, Jaesoon Lim, Younjoung Cho |
2020-11-24 |
| 10752645 |
Method of forming a thin film |
Youn Soo Kim, Jae-Soon Lim, Youn-Joung Cho, Haruyoshi Sato, Naoki Yamada +1 more |
2020-08-25 |
| 10600643 |
Method of forming thin film and method of manufacturing integrated circuit device using the same |
Youn Soo Kim, Hyun Jun Kim, Jin-sun Lee, Jae-Soon Lim |
2020-03-24 |
| 10468264 |
Method of fabricating semiconductor device |
Jae-Soon Lim, Youn-Joung Cho, Hyun Suk Lee, Gi-hee Cho |
2019-11-05 |
| 10329312 |
Lanthanum compound, method of synthesizing lanthanum compound, lanthanum precursor composition, method of forming thin film, and method of manufacturing integrated circuit device |
Youn Soo Kim, Jae-Soon Lim, Youn-Joung Cho, Haruyoshi Sato, Naoki Yamada +1 more |
2019-06-25 |
| 10259836 |
Methods of forming thin film and fabricating integrated circuit device using niobium compound |
Jae-Soon Lim, Youn-Joung Cho, Clement Lansalot, Won-tae Noh, Julien Lieffrig +1 more |
2019-04-16 |
| 10242877 |
Aluminum compound and methods of forming thin film and fabricating integrated circuit device by using the same |
Jae-Soon Lim, Youn-Joung Cho |
2019-03-26 |
| 10224200 |
Aluminum compound, method of forming thin film by using the same, and method of fabricating integrated circuit device |
Jae-Soon Lim, Youn-Joung Cho, Myong Woon Kim, Sang Ick Lee, Sung-duck Lee +1 more |
2019-03-05 |
| 9923047 |
Method for manufacturing a capacitor for semiconductor devices |
Se-hoon Oh, Seongyul Park, Chin Moo Cho, Yunjung Choi, Youn-Joung Cho +2 more |
2018-03-20 |
| 9790246 |
Nickel compound and method of forming thin film using the nickel compound |
Sang-Chul Youn, Youn-Joung Cho, Haruyoshi Sato, Takanori Koide, Naoki Yamada +2 more |
2017-10-17 |
| 9637511 |
Method of forming thin film using a heterostructured nickel compound |
Sang-Chul Youn, Youn-Joung Cho, Haruyoshi Sato, Takanori Koide, Naoki Yamada +2 more |
2017-05-02 |
| 9391089 |
Method of manufacturing semiconductor device including nickel-containing film |
Sang-Chul Youn, Youn-Joung Cho, Seung-min Ryu |
2016-07-12 |
