Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12398459 | Silicon metal oxide encapsulation film comprising metal or metal oxide in thin film, and manufacturing method therefor | Myoung-Woon Kim, Sang Ick Lee, Se Jin JANG, Sung-Gi Kim, Jeong Joo PARK +7 more | 2025-08-26 |
| 12255075 | Atomic layer etching method using ligand exchange reaction | Jae Chul Lee, Hyun Sik Noh, Dong Kyun Lee, Eun Ae Jung, Kyoung-Mun Kim +3 more | 2025-03-18 |
| 11901191 | Atomic layer etching method and semiconductor device manufacturing method using the same | Eun Hyea KO, Hee Yeon Jeong, Jun-Hee Cho, Gyu-hee Park, Joong Jin PARK +2 more | 2024-02-13 |
| 11749522 | Composition for depositing silicon-containing thin film containing bis(aminosilyl)alkylamine compound and method for manufacturing silicon-containing thin using the same | Sung-Gi Kim, Jeong Joo PARK, Joong Jin PARK, Se Jin JANG, Sang-Do Lee +3 more | 2023-09-05 |
| 11390635 | Composition for depositing silicon-containing thin film and method for producing silicon-containing thin film using the same | Sung-Gi Kim, Joong Jin PARK, Se Jin JANG, Gun Joo PARK, Jeong Joo PARK +4 more | 2022-07-19 |
| 11393676 | Composition for depositing silicon-containing thin film containing bis(aminosilyl)alkylamine compound and method for manufacturing silicon-containing thin film using the same | Sung-Gi Kim, Jeong Joo PARK, Joong Jin PARK, Se Jin JANG, Sang-Do Lee +3 more | 2022-07-19 |
| 11358974 | Silylamine compound, composition for depositing silicon-containing thin film containing the same, and method for manufacturing silicon-containing thin film using the composition | Sung-Gi Kim, Jeong Joo PARK, Joong Jin PARK, Se Jin JANG, Sang-Do Lee +3 more | 2022-06-14 |
| 11319333 | Disilylamine compound, method for preparing the same, and composition for depositing silicon-containing thin film including the same | Sung-Gi Kim, Se Jin JANG, Joong Jin PARK, Sang-Do Lee, Jeong Joo PARK +4 more | 2022-05-03 |
| 10894799 | Composition for depositing silicon-containing thin film including disilylamine compound and method for manufacturing silicon-containing thin film using the same | Sung-Gi Kim, Se Jin JANG, Joong Jin PARK, Sang-Do Lee, Jeong Joo PARK +4 more | 2021-01-19 |
| 10202407 | Trisilyl amine derivative, method for preparing the same and silicon-containing thin film using the same | Se Jin JANG, Sang-Do Lee, Jong Hyun Kim, Sung-Gi Kim, Do Yeon Kim +3 more | 2019-02-12 |
| 9916974 | Amino-silyl amine compound and the manufacturing method of dielectric film containing Si—N bond by using atomic layer deposition | Se Jin JANG, Sang-Do Lee, Jong Hyun Kim, Sung-Gi Kim, Sang Yong Jeon +3 more | 2018-03-13 |
| 9809608 | Cyclodisilazane derivative, method for preparing the same and silicon-containing thin film using the same | Se Jin JANG, Sung-Gi Kim, Jong Hyun Kim, Do Yeon Kim, Sang-Do Lee +3 more | 2017-11-07 |
| 9586979 | Amino-silyl amine compound, method for preparing the same and silicon-containing thin-film using the same | Se Jin JANG, Sang-Do Lee, Sung-Gi Kim, Jang-Hyeon Seok, Sang Ick Lee +1 more | 2017-03-07 |
| 9245740 | Amino-silyl amine compound, method for preparing the same and silicon-containing thin-film using the same | Se Jin JANG, Sang-Do Lee, Sung-Gi Kim, Jong Hyun Kim, Jang-Hyeon Seok +2 more | 2016-01-26 |