| 12398459 |
Silicon metal oxide encapsulation film comprising metal or metal oxide in thin film, and manufacturing method therefor |
Myoung-Woon Kim, Sang Ick Lee, Se Jin JANG, Sung-Gi Kim, Jeong Joo PARK +7 more |
2025-08-26 |
| 12255075 |
Atomic layer etching method using ligand exchange reaction |
Jae Chul Lee, Hyun Sik Noh, Dong Kyun Lee, Eun Ae Jung, Kyoung-Mun Kim +3 more |
2025-03-18 |
| 11901191 |
Atomic layer etching method and semiconductor device manufacturing method using the same |
Eun Hyea KO, Hee Yeon Jeong, Jun-Hee Cho, Gyu-hee Park, Joong Jin PARK +2 more |
2024-02-13 |
| 11749522 |
Composition for depositing silicon-containing thin film containing bis(aminosilyl)alkylamine compound and method for manufacturing silicon-containing thin using the same |
Sung-Gi Kim, Jeong Joo PARK, Joong Jin PARK, Se Jin JANG, Sang-Do Lee +3 more |
2023-09-05 |
| 11390635 |
Composition for depositing silicon-containing thin film and method for producing silicon-containing thin film using the same |
Sung-Gi Kim, Joong Jin PARK, Se Jin JANG, Gun Joo PARK, Jeong Joo PARK +4 more |
2022-07-19 |
| 11393676 |
Composition for depositing silicon-containing thin film containing bis(aminosilyl)alkylamine compound and method for manufacturing silicon-containing thin film using the same |
Sung-Gi Kim, Jeong Joo PARK, Joong Jin PARK, Se Jin JANG, Sang-Do Lee +3 more |
2022-07-19 |
| 11358974 |
Silylamine compound, composition for depositing silicon-containing thin film containing the same, and method for manufacturing silicon-containing thin film using the composition |
Sung-Gi Kim, Jeong Joo PARK, Joong Jin PARK, Se Jin JANG, Sang-Do Lee +3 more |
2022-06-14 |
| 11319333 |
Disilylamine compound, method for preparing the same, and composition for depositing silicon-containing thin film including the same |
Sung-Gi Kim, Se Jin JANG, Joong Jin PARK, Sang-Do Lee, Jeong Joo PARK +4 more |
2022-05-03 |
| 10894799 |
Composition for depositing silicon-containing thin film including disilylamine compound and method for manufacturing silicon-containing thin film using the same |
Sung-Gi Kim, Se Jin JANG, Joong Jin PARK, Sang-Do Lee, Jeong Joo PARK +4 more |
2021-01-19 |
| 10202407 |
Trisilyl amine derivative, method for preparing the same and silicon-containing thin film using the same |
Se Jin JANG, Sang-Do Lee, Jong Hyun Kim, Sung-Gi Kim, Do Yeon Kim +3 more |
2019-02-12 |
| 9916974 |
Amino-silyl amine compound and the manufacturing method of dielectric film containing Si—N bond by using atomic layer deposition |
Se Jin JANG, Sang-Do Lee, Jong Hyun Kim, Sung-Gi Kim, Sang Yong Jeon +3 more |
2018-03-13 |
| 9809608 |
Cyclodisilazane derivative, method for preparing the same and silicon-containing thin film using the same |
Se Jin JANG, Sung-Gi Kim, Jong Hyun Kim, Do Yeon Kim, Sang-Do Lee +3 more |
2017-11-07 |
| 9586979 |
Amino-silyl amine compound, method for preparing the same and silicon-containing thin-film using the same |
Se Jin JANG, Sang-Do Lee, Sung-Gi Kim, Jang-Hyeon Seok, Sang Ick Lee +1 more |
2017-03-07 |
| 9245740 |
Amino-silyl amine compound, method for preparing the same and silicon-containing thin-film using the same |
Se Jin JANG, Sang-Do Lee, Sung-Gi Kim, Jong Hyun Kim, Jang-Hyeon Seok +2 more |
2016-01-26 |
