Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12255075 | Atomic layer etching method using ligand exchange reaction | Jae Chul Lee, Hyun Sik Noh, Dong Kyun Lee, Eun Ae Jung, Jooyong Kim +3 more | 2025-03-18 |
| 7326520 | Copolymer of alicyclic olefin having secondary hydroxyl group and acryl compound, and chemically amplified resist composition containing the same | Hyun-Sang Joo, Joo-Hyeon Park, Dong-Chul Seo, Young-Taek Lim, Seong-Duk Cho +1 more | 2008-02-05 |