Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12365700 | Group 4 metal element-containing compound, precursor composition including same, and method for manufacturing thin film using same | Hyun-Kee Kim, Cheol-Wan Park, Ki-Yeung Mun, Ee-Seul SHIN, Eun Jeong Cho +1 more | 2025-07-22 |
| 11999756 | Method for producing organometallic compound and thin film fabricated using organometallic compound obtained thereby | Jin-Hyung Seo, Mi Ra Park, Jung-Woo Park, Hyung Jun Kim, Tae-Wook Nam +1 more | 2024-06-04 |
| 11495453 | Vapor deposition precursor having excellent thermal stability and reactivity and preparing method therefor | Jung-Woo Park, Hyo Suk Kim, Min Sung Park | 2022-11-08 |
| 11472821 | Precursor compounds for atomic layer deposition (ALD) and chemical vapor deposition (CVD) and ALD/CVD process using the same | Jung Wun HWANG, Ki-Yeung Mun, Jun Won Lee, Kyu Hyun Yeom, Jung-Woo Park | 2022-10-18 |
| 11414434 | Rare earth precursor, method of manufacturing same and method of forming thin film using same | Jung-Woo Park, Hyo Suk Kim, Eun Jeong Cho | 2022-08-16 |
| 11401290 | Cobalt precursor, method of preparing same and method of manufacturing thin film using same | Jung-Woo Park, Hyo Suk Kim, Ming-Sung Park | 2022-08-02 |
| 11267828 | Silicon precursor and method of manufacturing silicon-containing thin film using the same | Jae Seok An, Jong-Ryul Park, Min-Hyuk NIM, Jung-Woo Park | 2022-03-08 |
| 10202407 | Trisilyl amine derivative, method for preparing the same and silicon-containing thin film using the same | Se Jin JANG, Sang-Do Lee, Jong Hyun Kim, Sung-Gi Kim, Do Yeon Kim +3 more | 2019-02-12 |
| 9916974 | Amino-silyl amine compound and the manufacturing method of dielectric film containing Si—N bond by using atomic layer deposition | Se Jin JANG, Sang-Do Lee, Jong Hyun Kim, Sung-Gi Kim, Sang Yong Jeon +3 more | 2018-03-13 |
| 9809608 | Cyclodisilazane derivative, method for preparing the same and silicon-containing thin film using the same | Se Jin JANG, Byeong-il YANG, Sung-Gi Kim, Jong Hyun Kim, Do Yeon Kim +3 more | 2017-11-07 |
| 9586979 | Amino-silyl amine compound, method for preparing the same and silicon-containing thin-film using the same | Se Jin JANG, Sang-Do Lee, Sung-Gi Kim, Byeong-il YANG, Sang Ick Lee +1 more | 2017-03-07 |
| 9245740 | Amino-silyl amine compound, method for preparing the same and silicon-containing thin-film using the same | Se Jin JANG, Sang-Do Lee, Sung-Gi Kim, Jong Hyun Kim, Byeong-il YANG +2 more | 2016-01-26 |