Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8796142 | Method for forming tantalum nitride film | Satoru Toyoda, Harunori Ushikawa, Tomoyasu Kondo, Kyuzo Nakamura | 2014-08-05 |
| 8216642 | Method of manufacturing film | Masamichi Harada | 2012-07-10 |
| 8158198 | Method for forming tantalum nitride film | Satoru Toyoda, Harunori Ushikawa, Tomoyasu Kondo, Kyuzo Nakamura | 2012-04-17 |
| 8158197 | Method for forming tantalum nitride film | Satoru Toyoda, Harunori Ushikawa, Tomoyasu Kondo, Kyuzo Nakamura | 2012-04-17 |
| 8105468 | Method for forming tantalum nitride film | Satoru Toyoda, Harunori Ushikawa, Tomoyasu Kondo, Kyuzo Nakamura | 2012-01-31 |
| 7790590 | Selective W-CVD method and method for forming multi-layered Cu electrical interconnection | Masamichi Harada, Nobuyuki Kato | 2010-09-07 |
| 7338900 | Method for forming tungsten nitride film | Eiichi Mizuno, Masamichi Harada, Nobuyuki Kato | 2008-03-04 |