Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12334374 | Abnormality detecting apparatus, semiconductor manufacturing apparatus, and abnormality detecting method | — | 2025-06-17 |
| 11526160 | Failure detection system and failure detection method | Masashi Takahashi, Miki Ouchi, Tomohiro Saito | 2022-12-13 |
| 11492702 | Film-forming apparatus and film-forming method | Manabu Honma | 2022-11-08 |
| 10731255 | Film forming method | Manabu Honma, Kohei Doi | 2020-08-04 |