Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11869798 | Deposition apparatus | Manabu Honma, Noriko Sato | 2024-01-09 |
| 9082807 | Lid opening and closing device | — | 2015-07-14 |
| 8936050 | Lid opening and closing device | — | 2015-01-20 |
| 8692208 | Ion supply device and workpiece processing system provided with the same | — | 2014-04-08 |
| 8450700 | Ion supply device | — | 2013-05-28 |
| 8452540 | Earthquake damage spread reducing method and earthquake damage spread reducing system for use in semiconductor manufacturing apparatus | Hiroshi Kikuchi | 2013-05-28 |
| 8190277 | Method for limiting expansion of earthquake damage and system for limiting expansion of earthquake damage for use in semiconductor manufacturing apparatus | Hiroshi Kikuchi | 2012-05-29 |