Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12385132 | Substrate processing apparatus and substrate processing method | Ibuki HAYASHI, Yasushi Takeuchi, Manabu Honma | 2025-08-12 |
| 12272590 | Substrate processing apparatus | Yasutomo Kimura, Hisashi Takahashi | 2025-04-08 |
| 12255092 | Substrate processing apparatus | — | 2025-03-18 |
| 12217998 | Substrate processing apparatus | Nobuhiro Takahashi | 2025-02-04 |
| 11885003 | Rotational drive device, substrate processing apparatus, and rotational driving method | Yasutomo Kimura | 2024-01-30 |
| 11765879 | Substrate processing apparatus and monitoring method | — | 2023-09-19 |
| 11670999 | Magnetic coupling device | Akihiro Kimoto, Satoshi Yoshimoto, Norihiko Kishimoto, Keita Hayashi | 2023-06-06 |
| 10763147 | Substrate warpage detection device, substrate warpage detection method, and substrate processing apparatus and substrate processing method using the same | Yuya Sasaki, Toshiya Chiba | 2020-09-01 |
| 10615066 | Substrate warping monitoring device and substrate processing apparatus using the same, and substrate warping monitoring method | Toshiya Chiba, Yuya Sasaki | 2020-04-07 |
| 9576748 | Electricity storage device and method for manufacturing same | — | 2017-02-21 |