Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12394656 | Mounting table and substrate processing apparatus | Katsuyoshi Aikawa, Hiroshi Sone | 2025-08-19 |
| 12392026 | Method and device for substrate processing | Tamaki Takeyama, Hiroaki Chihaya, Motoi YAMAGATA, Manabu Nakagawasai | 2025-08-19 |
| 11605547 | Temperature measuring mechanism, temperature measuring method, and stage device | Manabu Nakagawasai, Naoyuki Suzuki, Hiroyuki Yokohara | 2023-03-14 |
| 11532784 | Substrate processing apparatus and method | Manabu Nakagawasai, Koji Maeda, Motoi YAMAGATA | 2022-12-20 |
| 11417504 | Stage device and processing apparatus | Manabu Nakagawasai, Naoyuki Suzuki, Hiroyuki Yokohara, Motoi YAMAGATA, Koji Maeda | 2022-08-16 |
| 11414747 | Sputtering device | Junichi Takei, Hiroshi Sone, Naoyuki Suzuki | 2022-08-16 |
| 11293092 | Stage device and processing apparatus | Manabu Nakagawasai, Naoyuki Suzuki | 2022-04-05 |
| 10254693 | Fixing unit of plate-shaped member, PVD processing apparatus and fixing method of plate-shaped member | Hiroyuki Yokohara, Hiroshi Sone, Naoyuki Suzuki | 2019-04-09 |
| 9787222 | Electrostatic attraction apparatus, electrostatic chuck and cooling treatment apparatus | Kaoru Yamamoto, Naoyuki Suzuki | 2017-10-10 |
| 6814002 | Printing system | — | 2004-11-09 |