Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12051566 | Plasma processing apparatus | Hitoshi Kato, Hiroyuki Kikuchi, Yuji Sawada | 2024-07-30 |
| 10096504 | Method for managing atmosphere in storage container | Katsuhiko Oyama, Yasushi Takeuchi | 2018-10-09 |
| 9425074 | Heat treatment apparatus | Hidekazu Sato, Tomohiro Shiobara | 2016-08-23 |
| 9103029 | Processing apparatus and film forming method | Yu Wamura, Yuichiro Morozumi, Izumi Sato | 2015-08-11 |
| 7632354 | Thermal processing system with improved process gas flow and method for injecting a process gas into a thermal processing system | Anthony Dip, Meenakshisundaram Gandhi | 2009-12-15 |