Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9005877 | Method of forming patterns using block copolymers and articles thereof | Benjamen M. Rathsack, Mark H. Somervell | 2015-04-14 |
| 8012859 | Atomic layer deposition of silicon and silicon-containing films | Raymond Joe | 2011-09-06 |
| 7964441 | Catalyst-assisted atomic layer deposition of silicon-containing films with integrated in-situ reactive treatment | Raymond Joe | 2011-06-21 |
| 7632354 | Thermal processing system with improved process gas flow and method for injecting a process gas into a thermal processing system | Anthony Dip, Shinji Asari | 2009-12-15 |