Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7677858 | Vertical heat treatment system and method of transferring process objects | Satoshi Asari, Hiroshi Kikuchi | 2010-03-16 |
| 7547209 | Vertical heat treatment system and automatic teaching method for transfer mechanism | Satoshi Asari, Hiroshi Kikuchi | 2009-06-16 |
| 7416405 | Vertical type of thermal processing apparatus and method of using the same | Satoshi Asari | 2008-08-26 |
| 5853486 | Treatment system and treatment apparatus with multi-stage carrier storage chambers | Yuji Ono | 1998-12-29 |
| 5829969 | Vertical heat treating apparatus | Masahiro Miyashita, Kenichi Yamaga | 1998-11-03 |
| 5788448 | Processing apparatus | Tsutomu Wakamori, Hiroyuki Iwai | 1998-08-04 |
| 5639234 | Treatment system and treatment apparatus | Yuji Ono | 1997-06-17 |
| 5527390 | Treatment system including a plurality of treatment apparatus | Yuji Ono | 1996-06-18 |
| 5378145 | Treatment system and treatment apparatus | Yuji Ono | 1995-01-03 |