KM

Katsuhiko Mihara

TL Tokyo Electron Limited: 9 patents #845 of 5,567Top 20%
TL Tokyo Electron Tohoku Limited: 1 patents #33 of 103Top 35%
Overall (All Time): #581,703 of 4,157,543Top 15%
9
Patents All Time

Issued Patents All Time

Showing 1–9 of 9 patents

Patent #TitleCo-InventorsDate
7677858 Vertical heat treatment system and method of transferring process objects Satoshi Asari, Hiroshi Kikuchi 2010-03-16
7547209 Vertical heat treatment system and automatic teaching method for transfer mechanism Satoshi Asari, Hiroshi Kikuchi 2009-06-16
7416405 Vertical type of thermal processing apparatus and method of using the same Satoshi Asari 2008-08-26
5853486 Treatment system and treatment apparatus with multi-stage carrier storage chambers Yuji Ono 1998-12-29
5829969 Vertical heat treating apparatus Masahiro Miyashita, Kenichi Yamaga 1998-11-03
5788448 Processing apparatus Tsutomu Wakamori, Hiroyuki Iwai 1998-08-04
5639234 Treatment system and treatment apparatus Yuji Ono 1997-06-17
5527390 Treatment system including a plurality of treatment apparatus Yuji Ono 1996-06-18
5378145 Treatment system and treatment apparatus Yuji Ono 1995-01-03