Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12368030 | Deposition method and deposition apparatus | Hitoshi Kato, Yu Wamura, Yuji Sawada, Hiroyuki Kikuchi | 2025-07-22 |
| 12205817 | Method for depositing film and film deposition system | Hitoshi Kato, Toru Ishii, Yuji SESHIMO | 2025-01-21 |
| 11905595 | Film deposition apparatus and film deposition method | Hitoshi Kato, Toru Ishii, Yuji SESHIMO | 2024-02-20 |
| 8940096 | Vertical thermal processing apparatus and substrate supporter | Satoshi Asari, Katsuya Toba, Izumi Satoh | 2015-01-27 |
| 7762809 | Heat treatment apparatus | Kiichi Takahashi, Izumi Sato, Kiyohiko Takahashi | 2010-07-27 |