YM

Yoshinobu Motodate

TL Tokyo Electron Limited: 2 patents #2,602 of 5,567Top 50%
Overall (All Time): #2,070,246 of 4,157,543Top 50%
2
Patents All Time

Issued Patents All Time

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
8565911 Thermal processing apparatus, thermal processing method, and storage medium Yo Abe, Kiichi Takahashi, Junya Sato 2013-10-22
8423175 Thermal processing apparatus, thermal processing method, and storage medium Yo Abe, Kiichi Takahashi, Junya Sato 2013-04-16