Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8979469 | Heat treatment apparatus and method of transferring substrates to the same | Kiichi Takahashi, Ittetsu Oikawa | 2015-03-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8979469 | Heat treatment apparatus and method of transferring substrates to the same | Kiichi Takahashi, Ittetsu Oikawa | 2015-03-17 |