Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8457788 | Method for teaching carrier means, storage medium and substrate processing apparatus | Takashi Asakawa, Masayuki Enomoto | 2013-06-04 |
| 8255082 | Method for teaching carrier means, storage medium and substrate processing apparatus | Takashi Asakawa, Masayuki Enomoto | 2012-08-28 |
| 8181769 | Workpiece transfer mechanism, workpiece transfer method and workpiece processing system | Katsuyuki Hishiya, Kiichi Takahashi | 2012-05-22 |