Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8021987 | Method of modifying insulating film | Takuya Sugawara, Genji Nakamura, Shigenori Ozaki, Toshio Nakanishi, Masaru Sasaki +4 more | 2011-09-20 |
| 7662236 | Method for forming insulation film | Takuya Sugawara, Genji Nakamura, Shigenori Ozaki, Toshio Nakanishi, Masaru Sasaki +1 more | 2010-02-16 |
| 7655574 | Method of modifying insulating film | Takuya Sugawara, Genji Nakamura, Shigenori Ozaki, Toshio Nakanishi, Masaru Sasaki +4 more | 2010-02-02 |
| 7622402 | Method for forming underlying insulation film | Takuya Sugawara, Genji Nakamura, Shigenori Ozaki, Toshio Nakanishi, Masaru Sasaki +4 more | 2009-11-24 |
| 7446052 | Method for forming insulation film | Takuya Sugawara, Genji Nakamura, Shigenori Ozaki, Toshio Nakanishi, Masaru Sasakii +1 more | 2008-11-04 |
| 7217659 | Process for producing materials for electronic device | Takuya Sugawara, Toshio Nakanishi, Shigenori Ozaki, Seiji Matsuyama, Shigemi Murakawa | 2007-05-15 |
| 6933249 | Method of fabricating semiconductor device | Shin Yokoyama, Anri Nakajima, Genji Nakamura, Masayuki Imai, Tsukasa Yonekawa | 2005-08-23 |
| 6897149 | Method of producing electronic device material | Takuya Sugawara, Toshio Nakanishi, Shigenori Ozaki, Seiji Matsuyama, Shigemi Murakawa | 2005-05-24 |
| 6821566 | Method and apparatus for forming insulating film containing silicon oxy-nitride | Genji Nakamura, Masayuki Imai, Asami Suemura, Shingo Hishiya | 2004-11-23 |
| 5391506 | Manufacturing method for semiconductor devices with source/drain formed in substrate projection. | Hiroyasu Kunitomo | 1995-02-21 |
| 5365083 | Semiconductor device of band-to-band tunneling type | — | 1994-11-15 |