Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10480073 | Rotating semi-batch ALD device | — | 2019-11-19 |
| 8573151 | Microwave plasma processing apparatus, dielectric window for use in the microwave plasma processing apparatus, and method for manufacturing the dielectric window | Tadahiro Ohmi, Masaki Hirayama, Tetsuya Goto, Yasuyuki Shirai, Masafumi Kitano +2 more | 2013-11-05 |
| 7374635 | Forming method and forming system for insulation film | Toshikazu Kumai, Toshio Nakanishi | 2008-05-20 |
| 7217659 | Process for producing materials for electronic device | Takuya Sugawara, Toshio Nakanishi, Shigenori Ozaki, Seiji Matsuyama, Yoshihide Tada | 2007-05-15 |
| 7166185 | Forming system for insulation film | Toshikazu Kumai, Toshio Nakanishi | 2007-01-23 |
| 6897149 | Method of producing electronic device material | Takuya Sugawara, Toshio Nakanishi, Shigenori Ozaki, Seiji Matsuyama, Yoshihide Tada | 2005-05-24 |
| 6470824 | Semiconductor manufacturing apparatus | Satoru Kawakami, Mitsuhiro Yuasa, Toshiaki Hongoh | 2002-10-29 |
| 6399520 | Semiconductor manufacturing method and semiconductor manufacturing apparatus | Satoru Kawakami, Mitsuhiro Yuasa, Toshiaki Hongoh | 2002-06-04 |
| 5518572 | Plasma processing system and method | Osamu Kinoshita, Naoki Kubota | 1996-05-21 |
| 4914948 | Apparatus for monitoring burden distribution in furnace | Seiji Taguchi, Makoto Nomura, Ryoji Takabe, Yoshiharu Iwashita, Masahiro Ishii | 1990-04-10 |
| 4697453 | Apparatus for monitoring burden distribution in furnace | Seiji Taguchi, Makoto Nomura, Ryoji Takabe, Yoshiharu Iwashita, Masahiro Ishii | 1987-10-06 |