Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8882962 | Plasma processing apparatus | Jun Yamashita, Hideo Nakamura, Junichi Kitagawa | 2014-11-11 |
| 7887637 | Method for cleaning treatment chamber in substrate treating apparatus and method for detecting endpoint of cleaning | Shigenori Ozaki, Hideyuki Noguchi, Yoshiro Kabe, Masaru Sasaki | 2011-02-15 |