Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7546840 | Method for cleaning reaction container and film deposition system | Kazuhide Hasebe, Daisuke Nozu | 2009-06-16 |
| 7368384 | Film formation apparatus and method of using the same | Atsushi Endo, Tomonori Fujiwara, Yuichiro Morozumi, Katsushige Harada, Shigeru Nakajima +2 more | 2008-05-06 |
| 7084023 | Method of manufacturing semiconductor device, film-forming apparatus, and storage medium | Shigeru Nakajima, Tomonori Fujiwara, Hiroaki Ikegawa, Genji Nakamura | 2006-08-01 |
| 7041546 | Film forming method for depositing a plurality of high-k dielectric films | Yuichiro Morozumi, Kazuhide Hasebe, Shigeru Nakajima, Haruhiko Furuya, Takahito Umehara +3 more | 2006-05-09 |
| 6313047 | MOCVD method of tantalum oxide film | Kazuhide Hasebe, Yuichiro Morozumi, Takuya Sugawara, Seiji Inumiya, Yoshitaka Tsunashima | 2001-11-06 |