Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12278083 | Substrate holder state detection device and substrate holder state detection method | Yuji Okita, Hideji NAOHARA, Tatsuya MASUI, Yuichi DEBA | 2025-04-15 |
| 12211197 | Substrate processing apparatus and substrate processing method | Hideji NAOHARA | 2025-01-28 |
| 11908752 | Substrate processing apparatus and substrate processing method | Hideji NAOHARA, Yuji Okita, Tatsuya MASUI | 2024-02-20 |
| 11646212 | Substrate treatment device | Hideji NAOHARA, Yuji Okita, Tatsuya MASUI | 2023-05-09 |
| 11322415 | Substrate treatment method and substrate treatment device | Hideji NAOHARA, Yuji Okita, Tatsuya MASUI | 2022-05-03 |
| 11011398 | Fume determination method, substrate processing method, and substrate processing equipment | Toru Endo, Masayuki Hayashi, Nobuyuki Shibayama, Hideji NAOHARA, Yuji Okita +1 more | 2021-05-18 |
| 10985038 | Determination method and substrate processing equipment | Hideji NAOHARA, Yuji Okita, Tatsuya MASUI | 2021-04-20 |
| 10665481 | Substrate processing apparatus and substrate processing method for discharge of processing liquid from nozzle | Hiroshi Sano | 2020-05-26 |
| 10651064 | Substrate treatment device and substrate treatment method | Hideji NAOHARA, Yuji Okita, Tatsuya MASUI | 2020-05-12 |
| 10580163 | Displacement detecting apparatus, displacement detecting method and substrate processing apparatus | Kazuhiro Kitamura | 2020-03-03 |
| 10402997 | Displacement detecting apparatus, displacement detecting method and substrate processing apparatus | Kazuhiro Kitamura | 2019-09-03 |
| 9975247 | Position detection apparatus, substrate processing apparatus, position detection method and substrate processing method | Yuji Okita, Hiroshi Sano | 2018-05-22 |
| 9838575 | Flow-down determination method, flow-down determination apparatus and discharge apparatus | — | 2017-12-05 |
| 6363168 | Measurement position determination on a semiconductor wafer | — | 2002-03-26 |
| 5150422 | Method of and apparatus for inspecting conductive pattern on printed board | Ryuji Kitakado, Hironobu Yano, Tetsuo Hoki, Takao Kanai | 1992-09-22 |
| 5144681 | Method of and apparatus for inspecting conductive pattern on printed board | Ryuji Kitakado, Hironobu Yano, Tetsuo Hoki, Takao Kanai | 1992-09-01 |
| 5027417 | Method of and apparatus for inspecting conductive pattern on printed board | Ryuji Kitakado, Hironobu Yano, Tetsuo Hoki, Takao Kanai | 1991-06-25 |