Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12293492 | Substrate processing apparatus and monitoring method in substrate processing apparatus | Shinji Shimizu, Ryo Yamada, Yuichi DEBA, Miwa MIYAWAKI | 2025-05-06 |
| 12278083 | Substrate holder state detection device and substrate holder state detection method | Yuji Okita, Hideji NAOHARA, Hiroaki KAKUMA, Yuichi DEBA | 2025-04-15 |
| 11908752 | Substrate processing apparatus and substrate processing method | Hideji NAOHARA, Yuji Okita, Hiroaki KAKUMA | 2024-02-20 |
| 11646212 | Substrate treatment device | Hideji NAOHARA, Yuji Okita, Hiroaki KAKUMA | 2023-05-09 |
| 11322415 | Substrate treatment method and substrate treatment device | Hideji NAOHARA, Yuji Okita, Hiroaki KAKUMA | 2022-05-03 |
| 11011398 | Fume determination method, substrate processing method, and substrate processing equipment | Toru Endo, Masayuki Hayashi, Nobuyuki Shibayama, Hideji NAOHARA, Hiroaki KAKUMA +1 more | 2021-05-18 |
| 10985038 | Determination method and substrate processing equipment | Hideji NAOHARA, Hiroaki KAKUMA, Yuji Okita | 2021-04-20 |
| 10651064 | Substrate treatment device and substrate treatment method | Hideji NAOHARA, Hiroaki KAKUMA, Yuji Okita | 2020-05-12 |