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Miwa MIYAWAKI

SC Screen Holdings Co.: 1 patents #452 of 686Top 70%
Overall (All Time): #2,411,632 of 4,157,543Top 60%
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Patent #TitleCo-InventorsDate
12293492 Substrate processing apparatus and monitoring method in substrate processing apparatus Shinji Shimizu, Ryo Yamada, Tatsuya MASUI, Yuichi DEBA 2025-05-06