Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12293492 | Substrate processing apparatus and monitoring method in substrate processing apparatus | Shinji Shimizu, Ryo Yamada, Tatsuya MASUI, Yuichi DEBA | 2025-05-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12293492 | Substrate processing apparatus and monitoring method in substrate processing apparatus | Shinji Shimizu, Ryo Yamada, Tatsuya MASUI, Yuichi DEBA | 2025-05-06 |