Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11935763 | Substrate processing device | — | 2024-03-19 |
| 11823921 | Substrate processing device and substrate processing method | Shuichi Yasuda, Kazuhiro Fujita, Noriyuki KIKUMOTO, Takahiro Yamaguchi | 2023-11-21 |
| 11211264 | Substrate processing apparatus and substrate processing method | Ryo MURAMOTO | 2021-12-28 |
| 11043398 | Substrate processing device | — | 2021-06-22 |
| 10933448 | Substrate treatment apparatus and substrate treatment method | Shuichi Yasuda, Noriyuki KIKUMOTO, Mitsutoshi SASAKI | 2021-03-02 |
| 10882080 | Substrate processing apparatus and method of processing substrate | — | 2021-01-05 |
| 10861717 | Substrate processing apparatus, processing liquid draining method, processing liquid replacing method, and substrate processing method | Noriyuki KIKUMOTO, Shuichi Yasuda | 2020-12-08 |
| 10741422 | Substrate processing device and substrate processing method | Noriyuki KIKUMOTO, Shuichi Yasuda, Kazuhiro Fujita, Mizuki Osawa, Hiroshi EBISUI | 2020-08-11 |
| 10727090 | Substrate processing apparatus and substrate processing method | Noriyuki KIKUMOTO, Toyohide Hayashi, Naoto Fujita, Wataru Sakai | 2020-07-28 |
| 10553422 | Substrate treatment method of treating substrate, and substrate treatment apparatus | Noriyuki KIKUMOTO, Shuichi Yasuda, Kazuhiro Fujita | 2020-02-04 |
| 10446388 | Substrate processing device | — | 2019-10-15 |
| 10249517 | Substrate processing apparatus | Ryo MURAMOTO | 2019-04-02 |