Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823929 | Substrate treating apparatus | Noriyuki KIKUMOTO, Hiroyuki Kawahara | 2023-11-21 |
| 11594436 | Substrate treating apparatus | Noriyuki KIKUMOTO, Hiroyuki Kawahara | 2023-02-28 |
| 11581208 | Substrate treating apparatus | Noriyuki KIKUMOTO, Hiroyuki Kawahara | 2023-02-14 |
| 9673072 | Substrate processing device, substrate processing method, and substrate processing system | Katsuaki Takagi, Seiichiro Sano, Satoshi Yamanaka | 2017-06-06 |