Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11209092 | Vacuum gate valve | — | 2021-12-28 |
| 10471479 | Treatment device and exhaust switching device therefor, and exhaust switching unit and switching valve box | Toshihito MORIOKA, Hideaki Higuchi, Tsutomu Kojima | 2019-11-12 |
| 10364901 | Vacuum gate valve | — | 2019-07-30 |
| 8123195 | Pressure control butterfly valve with opening/closing mechanism | — | 2012-02-28 |
| 7828267 | Slide valve | — | 2010-11-09 |
| 7377483 | Diaphragm valve | Katsuhiko Honma | 2008-05-27 |
| 7131629 | Composite valve for gas supply system | Satoru Fukatsu | 2006-11-07 |
| 7100892 | Non-rubbing gate valve for semiconductor fabrication apparatus | — | 2006-09-05 |
| 6572075 | Valve for controlling flow rate of gas | — | 2003-06-03 |
| 6321780 | Valve for controlling flow rate of gas | — | 2001-11-27 |
| 5755255 | Gate valve for regulating gas flow in semiconductor manufacturing | — | 1998-05-26 |
| 5678595 | Vacuum exhaust valve | — | 1997-10-21 |
| 5390895 | Slow vent valve | — | 1995-02-21 |
| 5174335 | Bidirectional vacuum valve | — | 1992-12-29 |
| 5160178 | Direct sealing coupling | — | 1992-11-03 |