Issued Patents All Time
Showing 26–34 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7608152 | Substrate processing apparatus and method | Koji Ando | 2009-10-27 |
| 7607967 | Substrate processing method and substrate processing apparatus | Kazuki Naoki | 2009-10-27 |
| 7584760 | Substrate processing apparatus | Akira Izumi, Takashi Kawamura, Itsuki Kajino | 2009-09-08 |
| 7547181 | Substrate position correcting method and apparatus using either substrate radius or center of rotation correction adjustment sum | Eiji Fukatsu, Hiroyuki Yashiki, Hideki Adachi | 2009-06-16 |
| 7503978 | Substrate processing apparatus and substrate processing method which performs predetermined processing on a substrate which is positioned approximately horizontally at a substrate processing position | Eiji Fukatsu | 2009-03-17 |
| 7373736 | Substrate processing apparatus and method with proximity guide and liquid-tight layer | — | 2008-05-20 |
| 7182821 | Substrate processing method and substrate processing apparatus | Akira Izumi | 2007-02-27 |
| 6669808 | Substrate processing apparatus and substrate processing method | Hideki Adachi, Akira Izumi, Itsuki Kajino | 2003-12-30 |
| 5927303 | Substrate processing apparatus | Akira Izumi | 1999-07-27 |