Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11908938 | Substrate processing liquid for etching a metal layer, substrate processing method and substrate processing apparatus | Dai Ueda | 2024-02-20 |
| 11897009 | Substrate processing method and substrate processing device | Dai Ueda, Yuta SASAKI, Hiroaki Kitagawa | 2024-02-13 |
| 11158523 | Substrate drying method and substrate drying apparatus | Yuta SASAKI | 2021-10-26 |
| 11133175 | Substrate treating method and substrate treating apparatus | Dai Ueda, Yuta SASAKI | 2021-09-28 |
| 11094565 | Substrate treating method, substrate treating liquid and substrate treating apparatus | Yuta SASAKI | 2021-08-17 |
| 10720342 | Substrate treating apparatus and substrate treating method | Yuta SASAKI | 2020-07-21 |
| 10699920 | Substrate treating method and substrate treating apparatus | Yuta SASAKI | 2020-06-30 |
| 10612844 | Vapor supplying apparatus, vapor drying apparatus, vapor supplying method, and vapor drying method | Katsuhiko Miya | 2020-04-07 |
| 10286425 | Substrate cleaning method and substrate cleaning apparatus | Yuta SASAKI, Katsuhiko Miya | 2019-05-14 |
| 10153181 | Substrate treating apparatus and substrate treating method | Yuta SASAKI, Soichi Nadahara, Dai Ueda, Hiroaki Kitagawa, Katsuya Okumura | 2018-12-11 |
| 9976804 | Vapor supplying apparatus, vapor drying apparatus, vapor supplying method, and vapor drying method | Katsuhiko Miya | 2018-05-22 |
| 9859110 | Substrate cleaning method and substrate cleaning apparatus | Katsuhiko Miya, Yuta SASAKI | 2018-01-02 |
| 9728396 | Substrate cleaning method and substrate cleaning apparatus | Katsuhiko Miya, Yuta SASAKI | 2017-08-08 |