Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5763892 | Ultraviolet irradiator for substrate, substrate treatment system, and method of irradiating substrate with ultraviolet light | Masahiro Miyagi, Katsunaga Narita | 1998-06-09 |
| 5234499 | Spin coating apparatus | Tadashi Sasaki, Yoshio Okamoto | 1993-08-10 |