Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7409864 | Pressure sensor and substrate processing apparatus | Takeshi Yane | 2008-08-12 |
| 7396199 | Substrate processing apparatus and substrate processing method | Yoshihiro Koyama | 2008-07-08 |
| 7337677 | Differential pressure flowmeter, flow controller, and apparatus for processing substrate | — | 2008-03-04 |
| 7279079 | Plating apparatus, cartridge and copper dissolution tank for use in the plating apparatus, and plating method | Hideaki Matsubara, Yoshihiro Koyama | 2007-10-09 |
| 7204916 | Plating apparatus and plating method | — | 2007-04-17 |
| 7169269 | Plating apparatus, plating cup and cathode ring | Hideaki Matsubara, Masahiro Miyagi, Ryuichi Hayama | 2007-01-30 |
| 6958113 | Plating apparatus and plating method | Takeshi Yane | 2005-10-25 |
| 5638687 | Substrate cooling method and apparatus | Minobu Matsunaga | 1997-06-17 |
| 5411076 | Substrate cooling device and substrate heat-treating apparatus | Minobu Matsunaga | 1995-05-02 |