Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8361831 | Zinc oxide film forming method and apparatus | — | 2013-01-29 |
| 7409864 | Pressure sensor and substrate processing apparatus | Yasuhiro Mizohata | 2008-08-12 |
| 6958113 | Plating apparatus and plating method | Yasuhiro Mizohata | 2005-10-25 |