Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11804387 | Substrate processing device and substrate processing method | Kazuki Inoue, Masaki Iwami, Hiroaki Ishii | 2023-10-31 |
| 10998203 | Substrate processing device and substrate processing method | Kazuki Inoue, Masaki Iwami, Hiroaki Ishii | 2021-05-04 |
| 10037902 | Substrate processing device and substrate processing method | Kazuki Inoue, Masaki Iwami, Hiroaki Ishii | 2018-07-31 |