Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6099643 | Apparatus for processing a substrate providing an efficient arrangement and atmospheric isolation of chemical treatment section | Masami Ohtani, Minobu Matsunaga, Ryuji Kitakado, Kaoru Aoki | 2000-08-08 |
| 5963753 | Substrate processing apparatus | Masami Ohtani, Minobu Matsunaga, Ryuji Kitakado, Kaoru Aoki, Masao Tsuji | 1999-10-05 |
| 4751383 | Method and apparatus for detection of position with correction of errors caused by errors in scale pitch | — | 1988-06-14 |