Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10423070 | Substrate treating method | Masashi Kanaoka, Masanori IMAMURA, Taiji Matsu, Hidetoshi Sagawa, Atsushi Tanaka +3 more | 2019-09-24 |
| 9383660 | Exposure apparatus and method of manufacturing device | Toshiyuki Yoshihara | 2016-07-05 |