Issued Patents All Time
Showing 26–41 of 41 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8851769 | Substrate processing method | — | 2014-10-07 |
| 8635968 | Substrate processing apparatus and substrate processing method | — | 2014-01-28 |
| 8585830 | Substrate processing apparatus and substrate processing method | Shuichi Yasuda, Masashi Kanaoka, Tadashi Miyagi, Kazuhito Shigemori, Toru Asano +4 more | 2013-11-19 |
| 8540824 | Substrate processing method | Masashi Kanaoka, Tadashi Miyagi, Kazuhito Shigemori, Shuichi Yasuda | 2013-09-24 |
| 8496761 | Substrate processing apparatus and substrate processing method | Akihiro Hisai, Toru Asano, Hiroshi Kobayashi, Tsuyoshi Okumura, Shuichi Yasuda +3 more | 2013-07-30 |
| 8356424 | Substrate processing method | Kazuhito Shigemori, Masashi Kanaoka, Tadashi Miyagi, Shuichi Yasuda | 2013-01-22 |
| 8040488 | Substrate processing apparatus | Shuichi Yasuda, Masashi Kanaoka, Tadashi Miyagi, Kazuhito Shigemori, Toru Asano +4 more | 2011-10-18 |
| 8034190 | Substrate processing apparatus and substrate processing method | Shuichi Yasuda, Masashi Kanaoka, Tadashi Miyagi, Kasuhito Shigemori, Toru Asano +3 more | 2011-10-11 |
| 7766565 | Substrate drying apparatus, substrate cleaning apparatus and substrate processing system | — | 2010-08-03 |
| 7726891 | Substrate processing apparatus and substrate processing method | Akihiro Hisai, Toru Asano, Hiroshi Kobayashi | 2010-06-01 |
| 7658560 | Substrate processing apparatus | — | 2010-02-09 |
| 7604424 | Substrate processing apparatus | Kazuhito Shigemori, Akiko Harumoto, Tadashi Miyagi, Masashi Kanaoka, Shuichi Yasuda | 2009-10-20 |
| 7497633 | Substrate processing apparatus and substrate processing method | Shuji Shibata, Tsuyoshi Okumura, Shuichi Yasuda, Masashi Kanaoka, Tadashi Miyagi +1 more | 2009-03-03 |
| 6913781 | Substrate processing apparatus and method including a device for applying a coating and a device for measuring the film quality of the coating | Akihiro Hisai | 2005-07-05 |
| 6760190 | Magnetic head wherein one of multiple insulating layers determines a zero throat level position | Atsushi Kato, Kiyonori Shiraki | 2004-07-06 |
| 6436560 | Magnetic head and magnetic disk device using the same | Atsushi Kato, Kiyonori Shiraki | 2002-08-20 |