Issued Patents All Time
Showing 26–44 of 44 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8932672 | Substrate processing apparatus | Koji Kaneyama, Masashi Kanaoka, Tadashi Miyagi, Kazuhito Shigemori, Tetsuya Hamada | 2015-01-13 |
| 8894775 | Substrate processing apparatus and substrate processing method | Tadashi Miyagi, Masashi Kanaoka, Kazuhito Shigemori, Masakazu Sanada | 2014-11-25 |
| 8585830 | Substrate processing apparatus and substrate processing method | Masashi Kanaoka, Koji Kaneyama, Tadashi Miyagi, Kazuhito Shigemori, Toru Asano +4 more | 2013-11-19 |
| 8540824 | Substrate processing method | Koji Kaneyama, Masashi Kanaoka, Tadashi Miyagi, Kazuhito Shigemori | 2013-09-24 |
| 8496761 | Substrate processing apparatus and substrate processing method | Koji Kaneyama, Akihiro Hisai, Toru Asano, Hiroshi Kobayashi, Tsuyoshi Okumura +3 more | 2013-07-30 |
| 8356424 | Substrate processing method | Koji Kaneyama, Kazuhito Shigemori, Masashi Kanaoka, Tadashi Miyagi | 2013-01-22 |
| 8218124 | Substrate processing apparatus with multi-speed drying having rinse liquid supplier that moves from center of rotated substrate to its periphery and stops temporarily so that a drying core can form | Tadashi Miyagi, Masashi Kanaoka, Kazuhito Shigemori, Masakazu Sanada | 2012-07-10 |
| 8040488 | Substrate processing apparatus | Masashi Kanaoka, Koji Kaneyama, Tadashi Miyagi, Kazuhito Shigemori, Toru Asano +4 more | 2011-10-18 |
| 8034190 | Substrate processing apparatus and substrate processing method | Masashi Kanaoka, Koji Kaneyama, Tadashi Miyagi, Kasuhito Shigemori, Toru Asano +3 more | 2011-10-11 |
| 7604424 | Substrate processing apparatus | Kazuhito Shigemori, Koji Kaneyama, Akiko Harumoto, Tadashi Miyagi, Masashi Kanaoka | 2009-10-20 |
| 7600522 | Substrate treatment method and substrate treatment apparatus | Masanobu Sato, Sadao Hirae | 2009-10-13 |
| 7497633 | Substrate processing apparatus and substrate processing method | Koji Kaneyama, Shuji Shibata, Tsuyoshi Okumura, Masashi Kanaoka, Tadashi Miyagi +1 more | 2009-03-03 |
| 7479205 | Substrate processing apparatus | Seiichiro Okuda, Hiroaki Sugimoto, Takuya Kuroda, Masanobu Sato, Sadao Hirae +2 more | 2009-01-20 |
| 7428907 | Substrate processing apparatus | Seiichiro Okuda, Hiroaki Sugimoto, Takuya Kuroda, Masanobu Sato, Sadao Hirae +2 more | 2008-09-30 |
| 7267130 | Substrate processing apparatus | Seiichiro Okuda, Hiroaki Sugimoto, Takuya Kuroda, Masanobu Sato, Sadao Hirae +2 more | 2007-09-11 |
| 6951221 | Substrate processing apparatus | Seiichiro Okuda, Hiroaki Sugimoto, Takuya Kuroda, Masanobu Sato, Sadao Hirae +2 more | 2005-10-04 |
| 6901938 | Substrate cleaning apparatus | Masanobu Sato, Sadao Hirae, Kenya Morinishi | 2005-06-07 |
| 6729561 | Cleaning nozzle and substrate cleaning apparatus | Sadao Hirae, Masanobu Sato | 2004-05-04 |
| 6705331 | Substrate cleaning apparatus | Masanobu Sato, Sadao Hirae, Kenya Morinishi | 2004-03-16 |