Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9028621 | Substrate cleaning method and substrate cleaning device | Tadashi Miyagi, Masahiko Harumoto | 2015-05-12 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9028621 | Substrate cleaning method and substrate cleaning device | Tadashi Miyagi, Masahiko Harumoto | 2015-05-12 |