Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7497633 | Substrate processing apparatus and substrate processing method | Koji Kaneyama, Shuji Shibata, Tsuyoshi Okumura, Shuichi Yasuda, Masashi Kanaoka +1 more | 2009-03-03 |
| 6514122 | System for manufacturing semiconductor device utilizing photolithography technique | Takayuki Saito, Takuya Matsushita | 2003-02-04 |
| 6217319 | Semiconductor manufacturing device and method of processing wafer | Yoshiaki Yamada, Takayuki Saito | 2001-04-17 |
| 6180320 | Method of manufacturing a semiconductor device having a fine pattern, and semiconductor device manufactured thereby | Takayuki Saito, Takeo Ishibashi, Toshiyuki Toyoshima, Kanji Sugino, Naoki Yasuda | 2001-01-30 |