Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9703199 | Substrate processing apparatus | Toru Asano, Takashi Taguchi, Tsuyoshi Mitsuhashi | 2017-07-11 |
| 8585830 | Substrate processing apparatus and substrate processing method | Shuichi Yasuda, Masashi Kanaoka, Koji Kaneyama, Tadashi Miyagi, Kazuhito Shigemori +4 more | 2013-11-19 |
| 8040488 | Substrate processing apparatus | Shuichi Yasuda, Masashi Kanaoka, Koji Kaneyama, Tadashi Miyagi, Kazuhito Shigemori +4 more | 2011-10-18 |