Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9728434 | Substrate processing apparatus, storage device, and method of transporting substrate storing container | Yukihiko Inagaki, Jun Yamamoto | 2017-08-08 |
| 8827621 | Substrate processing apparatus, storage device, and method of transporting substrate storing container | Yukihiko Inagaki, Jun Yamamoto | 2014-09-09 |