Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11495476 | Substrate treating apparatus | Koji Nishi, Yukihiko Inagaki, Ryuichi Yoshida | 2022-11-08 |
| 11387121 | Substrate treating apparatus and substrate treating system including pin lift mechanism below cooling base and heat plate | Yasuhiro Fukumoto, Yasuhiro Shiba | 2022-07-12 |
| 7651309 | Floating unit, and an article support apparatus having floating units | Yoshiteru Ikehata, Shigeto Murayama, Takayoshi Ono | 2010-01-26 |