Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8388298 | Apparatus for automatically correcting a positional deviation of a load | — | 2013-03-05 |
| 8118530 | Substrate storage facility and substrate processing facility, and method for operating substrate storage | — | 2012-02-21 |
| 7955044 | Method for processing substrates | Susumu Moriya | 2011-06-07 |
| 7694817 | Container for storing substrate having ventilated lid and fan | — | 2010-04-13 |
| 7651309 | Floating unit, and an article support apparatus having floating units | Shigeto Murayama, Takayoshi Ono, Tatsuhisa Tsuji | 2010-01-26 |
| 7344350 | Transporting apparatus with air-supplying support means and drive-force application means | Takayoshi Ono, Yuichi Morimoto | 2008-03-18 |
| 7329299 | Plate-shaped work piece transporting apparatus | Susumu Moriya, Shigeto Murayama, Yuichi Morimoto, Takayoshi Ono | 2008-02-12 |
| 7284945 | Transporting apparatus | Takayoshi Ono, Yuichi Morimoto | 2007-10-23 |
| 7140827 | Transporting apparatus | Takayoshi Ono, Yuichi Morimoto | 2006-11-28 |
| 7108474 | Apparatus for transporting plate-shaped work piece | Susumu Moriya, Shigeto Murayama, Yuichi Morimoto, Takayoshi Ohno | 2006-09-19 |
| 7004711 | Transporting apparatus | Takayoshi Ono, Yuichi Morimoto | 2006-02-28 |