Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5436848 | Method of and device for transporting semiconductor substrate in semiconductor processing system | Masami Nishida, Tetsuya Hamada, Noriaki Yokono, Takeo Okamoto | 1995-07-25 |
| 4846623 | Wafer transferring device | Masami Otani, Masami Nishida, Akio Tsuchiya | 1989-07-11 |