Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7231273 | Substrate processing apparatus and method including obstacle detection | Joichi Nishimura | 2007-06-12 |
| 4846623 | Wafer transferring device | Masami Nishida, Masahiro Himoto, Akio Tsuchiya | 1989-07-11 |
| 4362376 | Film processor with a by-pass transferring mechanism | — | 1982-12-07 |
| 4325222 | Device responsive to unusual temperature change in refrigerant compressor | Teruo Nakamura | 1982-04-20 |